Equipment and Calibration History
View Equipment |
| Date: |
2011-10-10 |
| From: |
Lab - none |
| To: |
Lab - none |
| Title: |
Maintenance |
| Notes: |
No flow in low flow mode. The internal 2um after the pressure controller seemed okay. I disassembled the inlet tubing and fittings to get a 10um filter out from infront of the pressure controller. This was completely plugged. I rinsed it with degreaser and DI water and dried it by blowing air through it. Flow was better but still seemed low. I reinstalled the filter and reassembled the inlet tubing. Now is slow flow the internal pressure is 156Torr. |
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